ummary
This apparatus is used for TEM / SEM specimen preparation with ease of operation.
By generating a glow discharge in a vacuum chamber as low as 1.33Pa and ionizing
the residual gas, the ion coater can sputter metals on a specimen,
clean, and etch a specimen with the energy of the ionized gas.
Specification
Specifications Upper electrode (target) 50mm in diameter (round shape)
Lower electrode 52mm in diameter
Cooling of specimen stage Water cooling
Clearance between target and specimen stage 20mm, 35mm 2 steps
Ionization voltage 0 to 1400V / DC
Ionization current 10mA (max) with ammeter
Electrode for coating (optional) Au / Pt-Pd / Ag
Vacuum pump RP20L / min (separate setting)